iMAT Aarhus University Centre for Integrated Materials Research

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 imat.au.dk Who are we? Zhengli Han

Zhengli Han

I work on dynamic photonic devices based on metasurfaces and MEMS-NEMS (micro/nano electromechanical systems) to enable sustainable optical systems.

Metasurfaces are 2D surfaces built from repeating structures smaller than the wavelength of light. As a result, they can manipulate light across the spectrum, including visible, infrared, and microwave ranges. Moreover, they allow control over wave amplitude, phase, polarization, and also the angular momentum. In contrast to passive surfaces, MEMS and NEMS add active control to the system. They use little power, respond to electrical signals, and can be made from sustainable materials. In addition, they also fit well into existing semiconductor manufacturing processes. 

We combine both technologies to create photonic devices that are efficient and adaptable.

Buzzwords:

MEMS, metasurfaces, colour through structuring, sustainable optical displays

Scanning electron microscope image of a MEMS cantilever array with repeating structural patterns, viewed at an angle and scaled at 100 micrometers.
Scanning electron microscope image showing a regular array of submicron aluminum nanoholes for optical applications such as structural colors.
Scanning electron microscope (SEM) image of a cantilever array used in micro-electro-mechanical systems (MEMS). The cantilevers are micrometer-sized and made using cleanroom processes.
Scanning electron microscope image of an aluminum nanohole array used for structural color generation. The periodic holes are patterned at the submicron scale to control light.

Applications:

Light amplitude/phase modulator, spatial light modulator, optical displays, imaging

Methods: 

Computational:

  • Device design with numerical simulations, such as COMSOL, Lumerical FDTD.

Experimental: 

  • Device fabrication in cleanroom with lithography (photolithography and electron beam lithography), film deposition, dry/wet patterning
  • Device characterization using spectroscopy, opto-electrical, SEM, AFM.

iMAT Research Topics:

Nanomaterials Engineering, Spectroscopic and Microscopic Techniques,Reducing critical raw materials

University profile

Zhengli Han

Tenure Track Assistant Professor Department of Electrical and Computer Engineering - Electronics and Photonics
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H 5125, 216
P +4593521000
Revised 16.07.2025
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Laura Rammelt